This study focuses on the description of oxidation of CdTe monocrystal surfaces after selective chemical etching. Measurements of surface morphology of the oxides occurring in short time are valuable for deeper understanding of the material degradation and fabrication of reliable devices with enhanced performance. The samples with (1 1 1) orientation were selectively etched and cleaned of oxide. Exposure of the oxide-free surfaces of CdTe to air at normal atmospheric conditions over 24 hours leads to an appearance of characteristic surface features. The oxidized surfaces were investigated by scanning electron microscopy, scanning probe microscopy, Raman spectroscopy and ellipsometry. The results indicate clear differences in the oxidation of Cd-terminated and Te-terminated surfaces.